The NSI Liquid Level Sensor & Control Box NSI137 series of liquid level sensors (LLS) provides a unique solution to measuring discrete liquid levels in UHP environments where the wetted surfaces must be 316L. The term “unique” refers to the NSI137 series high temperature capability and the ability to be modified for high density/viscosity liquid applications. The NSI137 series is excellent for most liquid precursor applications that are chemically compatible with 316L. Applications include LED precursors, ALD precursors, PEALD precursors, PECVD precursors, CVD precursors and pharma applications.

Benefits

  • Discrete level sensor probe
  • 316L wetted surfaces are excellent for use in ultra high purity (UHP) applications
  • High liquid viscosity/density capability

Features

  • Wetted surfaces 316 L stainless
  • Wetted surfaces electropolished to 10 ra
  • High temperature 175C
  • Pressure rated up to 300 psi
  • ±1.5 mm trigger points at each discrete level
  • ±0.75 mm is typical Repeatability of trigger points
  • Lowest trigger point is 0.15” from bottom of sensor
  • Excellent for use in NSI DOT 4B containers

Applications

  • Semiconductor Industries
  • Pharmaceutical Industries
  • LED Industry

MECHANICAL DIMENSIONS (in) inches

Control Box Specifications

  • Input Power: 24 VDC
  • Output Option 1: Relay
  • Output Option 2: 4-20mA Interface box
  • Output Option 3: 4 point - OV/5V (dry/wet) Interface box
NSI137 Series with ½” OD tube with a ½” or ¾” female VCR® fitting

Liquid Level Sensor Specifications

  • Parameter: Typical Value
  • Mounting: Female ½" or ¾" VCR
  • Probe Material (wetted surface): 316L
  • Pressure Rating: 600 PSI
  • He Leak Checked: 1 X 10-9cc sec
  • Pressure Rating: 600 PSI
  • Probe Temperature: -30°C to 100°C
  • Cable Temperature: -30°C to 100°C
  • Trigger pt Accuracy: ±1.5mm
  • Trigger pt Repeatability: Typical ±0.75mm

High-Temperature Liquid Level Sensor Specifications

  • Parameter: Typical Value
  • Mounting: Female ½" or ¾" VCR
  • Probe Material (wetted surface): 316L
  • Cable: Coax with 200°C capability
  • Pressure Rating: 600 PSI
  • He Leak Checked: 1 X 10-9cc sec
  • Pressure Rating: 600 PSI
  • Probe Temperature: -30°C to 100°C
  • Cable Temperature: -30°C to 100°C
  • Trigger pt Accuracy: ±1.5mm
  • Trigger pt Repeatability: Typical ±0.75mm

For more information: 503.620.9922 or email sales@nsi-mfg.com



NSI Products & Services