Liquid Level Sensor & Control Box

  • Discrete level sensor probe
  • 316L wetted surfaces are excellent for use in ultra high purity (UHP) applications
  • High liquid viscosity / density capability

NSI137 series of liquid level sensors (LLS) provides a unique solution to measuring discrete liquid levels in UHP environments where the wetted surfaces must be 316L. The term “unique” refers to the NSI137 series high temperature capability and the ability to be modified for high density/viscosity liquid applications. The NSI137 series is excellent for most liquid precursor applications that are chemically compatible with 316L. Applications include LED precursors, ALD precursors, PEALD precursors, PECVD precursors, CVD precursors and pharma applications.

Features

  • Wetted surfaces 316 L stainless
  • Wetted surfaces electropolished to 10 ra
  • High temperature 175C
  • Pressure rated up to 300 psi
  • ±1.5 mm trigger points at each discrete level
  • ±0.75 mm is typical Repeatability of trigger points
  • Lowest trigger point is 0.15” from bottom of sensor
  • Excellent for use in NSI DOT 4B containers

Applications

  • Semiconductor Industries
  • Pharmaceutical Industries
  • LED Industry

Specifications

Control Boxes

Input Power 24 VDC
Output Option 1 Relay
Output Option 2 4-20mA Interface box
Output Option 3 4 point - OV /5V (dry/wet) Interface box

MECHANICAL DIMENSIONS (in) inches

Specifications

Liquid Level Sensors

Parameter Typical Value
Mounting Female ½" or ¾" VCR
Probe Material (wetted surface) 316L
Pressure Rating 600 psi
He Leak Checked 1 X 10-9cc sec
Probe Temperature -30°C to 100°C
Cable Temperpature -30°C to 100°C
Trigger pt Accuracy ±1.5mm
Trigger pt Repeatability Typical ±0.75mm

NSI137 Series with ½” OD tube with a ½” or ¾” female VCR® fitting

Specifications

High Temperature Liquid Level Sensors

Parameter Typical Value
Mounting Female ½" or ¾" VCR
Probe Material (wetted surface) 316L
Cable Coax with 200°C capability
Pressure Rating 600 psi
He Leak Checked 1 X 10-9cc sec
Probe Temperature -30°C to 200°C
Cable Temperpature -30°C to 200°C
Trigger pt Accuracy ±1.5mm
Trigger pt Repeatability Typical ±0.75mm

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