Integrated Systems

NSI has worked closely with many customers to design, engineer, EH&S review, fabricate and oversee the installation and tool startup. Customer tools have been shipped and serviced around the globe. NSI provides 24/7 tool support. Examples of Chemical delivery systems for Compound Semiconductor, Semiconductor and other Disruptive Technologies include, but are not limited to:

  • Liquid Pyrophoric Delivery Systems
  • Liquid Pyrophoric Reclaim/Recovery Systems
  • ARC Delivery, Dosing and Waste Recovery Systems
  • pH Controlled Systems
  • MFM controlled Systems
  • Chemical Recovery Systems
  • Abatement Systems
  • Integrated Reactors
  • Specialized Precursor (liquid and vapor) delivery
  • Precision Dosing Systems (high and low volume)
  • Gas Panels and Gas Boxes, VMB’s, gas cabinets
  • Moisture Dry-Down Systems
  • Software Support worldwide 24/7

Safety: NSI builds tools/ systems that are compliant with UL 508, Class 1., Div 2, IEC-ex
NSI can provide as little or as much i design, engineering, programming and manufacturing expertise as required.

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